Electron imaging of dielectrics under simultaneous electron–ion irradiation
نویسندگان
چکیده
منابع مشابه
Electron imaging of dielectrics under simultaneous electron–ion irradiation
We demonstrate that if charging caused by electron irradiation of an insulator is controlled by a defocused flux of soft-landing positive ions, secondary electron ~SE! images can contain contrast due to lateral variations in ~i! changes in the SE yield caused by subsurface trapped charge and ~ii! the SE-ion recombination rate. Both contrast mechanisms can provide information on microscopic vari...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2002
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1448875